Integrated resonant cavity acoustic transducer

Details Integrated resonant cavity acoustic transducer Integrated resonant cavity acoustic transducer

1992-10-29

1994-04-12

Pihulic, Daniel T.

Communications, electrical: acoustic wave systems and devices

Signal transducers

Receivers

381174, H04R 1900

Patent

active

053032101

ABSTRACT:
An integrated resonant cavity acoustic transducer includes a substrate chip having a cavity; a movable plate electrode; means for resiliently mounting the movable plate electrode across the cavity in the substrate chip; and a perforated electrode spaced from the movable plate electrode and mounted across the cavity in the substrate chip; the cavity has a depth from the movable electrode to the back wall of the cavity of approximately one quarter wavelength of the acoustic energy for enabling constructive interference between the primary and reflected acoustic wave for maximizing the displacement of said movable electrode.

REFERENCES:
patent: 4184094 (1980-01-01), Kopel
patent: 4211948 (1980-07-01), Smith et al.
patent: 4414482 (1983-11-01), Lewis et al.
patent: 4429246 (1984-01-01), Miyajima
patent: 5007030 (1991-04-01), Sullivan et al.
patent: 5146435 (1992-09-01), Bernstein

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