Oscillators – Solid state active element oscillator – Transistors
Patent
1997-10-24
2000-09-26
Kinkead, Arnold
Oscillators
Solid state active element oscillator
Transistors
331176, 331183, 331108C, 331 65, 331 47, 331154, 257415, 368156, H01L 4108
Patent
active
061247650
ABSTRACT:
An integrated oscillator and associated methods are provided for providing clock signals. The integrated oscillator preferably includes a micro-mechanical oscillating circuit for providing an oscillating clock signal. The micro-mechanical oscillating circuit preferably includes a support layer, a fixed layer positioned on a support layer, remaining portions of a sacrificial layer positioned only on portions of the fixed layer, and an oscillating layer positioned on the remaining portions of the sacrificial layer, overlying the fixed layer in spaced relation therefrom, and extending lengthwise generally transverse to a predetermined direction for defining a released beam for oscillating at a predetermined frequency. The spaced relation is preferably formed by removal of unwanted portions of the sacrificial layer. The integrated oscillator also preferably includes a clock signal controlling circuit connected to the micro-mechanical oscillating circuit for controlling the micro-mechanical oscillating circuit and for generating clock signals therefrom.
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Chan Tsiu Chiu
DeSilva Melvin Joseph
Sunkara Syama Sundar
Galanthay Theodore E.
Jorgenson Lisa K.
Kinkead Arnold
Regan Christopher F.
STMicroelectronics Inc.
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