Measuring and testing – Volume or rate of flow – Thermal type
Patent
1984-12-05
1986-09-02
Goldstein, Herbert
Measuring and testing
Volume or rate of flow
Thermal type
G01F 168
Patent
active
046088652
ABSTRACT:
An integrated circuit pyroelectric sensor includes two MOSFETS coupled in a differential amplifier configuration, each MOSFET having a common source. A pyroelectric capacitor is coupled to the gate of a respective one of the MOSFET. A polysilicon filament is disposed between the pyroelectric capacitors which acts as a heating element when a current is passed therethrough. The voltage difference between the drain of each MOSFET is thus a function of the voltage difference between the pyroelectric capacitors. One of the pyroelectric capacitors is disposed at the leading edge of the sensor with respect to the direction of a fluid flow. The fluid flow across the sensor will cause the first capacitor to have a different temperature than the other capacitor of the trailing edge of the sensor whose temperature is a function of the temperature of the heating element. As the temperature of each pyroelectric capacitor changes, the amount of charge stored by each pyroelectric capacitor changes, thereby developing a differential voltage across the gates, and hence, the drains, of the integrated MOSFETS. Since the charge stored and voltage across each pyroelectric capacitor is a function of temperature, the differential voltage between the drains of each MOSFET is a function of temperature.
REFERENCES:
patent: 3351786 (1967-11-01), Muller et al.
patent: 3519924 (1970-07-01), Burton
patent: 3585415 (1971-06-01), Muller et al.
patent: 3992940 (1976-11-01), Platzer, Jr.
patent: 4332157 (1982-06-01), Zemel et al.
patent: 4453405 (1984-06-01), Zemel
Electronics Letters, "Integrated Silicon Anemometer", 10/17/74, vol. 10: No. 21, A.F.P. VanPutten & S. Middelhoek.
IEEE Transactions on Electron Devices, "Monolithic Integrated Direction-Sensitive Flow Sensor", 1/82, vol. ED-29, No. 1, Johan H. Huijsing, Jacob P. Schuddemat, and Wouter Verhoef.
IEEE Int. Electron Devices Meeting, 12/5-7/83, "Monolithic Integrated Zinc-Oxide on Silicon Pyroelectric Anemometer, D. L. Polla, R. S. Muller and R. M. White.
Muller Richard S.
Polla Dennis L.
Goldstein Herbert
The Regents of the University of California
LandOfFree
Integrated pyroelectric sensor and method does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Integrated pyroelectric sensor and method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Integrated pyroelectric sensor and method will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1091442