Integrated prober, handler and tester for semiconductor componen

Details Integrated prober, handler and tester for semiconductor componen Integrated prober, handler and tester for semiconductor componen

1995-10-20

2000-02-15

Underwood, Donald W.

Material or article handling

Apparatus for charging a load holding or supporting element...

Load holding or supporting element including gripping means

901 40, B25J 1506

Patent

active

060245263

ABSTRACT:
An integral unit for use in testing semiconductor components. The unit is designed to manipulate either packaged semiconductor components or semiconductor wafers and present them to a test head. It provides significant space savings because it replaces the need for separate prober, handler and tester units. The integrated unit includes a positioning mechanism with a tool plate that can be changed to grasp either a semiconductor wafer or a tray of semiconductor components. The tool plate uses a vacuum plate. To hold a tray of semiconductor parts, the vacuum plate has numerous independently operable holes. Each hole is positioned behind one semiconductor component and can be engaged or released separately so that the components can be sorted into separate output bins. To hold a wafer, the tool plate has an extendible tongue member that can be inserted into a stack of semiconductor wafers to pick up one wafer in the stack. One disclosed positioning mechanism is a hexapod unit, which, due to its light weight, allows fast and accurate positioning of the semiconductor devices. Multiple positioning mechanisms are used in some instances to increase throughput.

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Tegal Advertisement, Electronics News , Sep. 25, 1995.
Geodetics Brochure, undated.

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