Measuring and testing – Fluid pressure gauge – Diaphragm
Patent
1995-06-23
1997-03-11
Dougherty, Elizabeth L.
Measuring and testing
Fluid pressure gauge
Diaphragm
73724, G01L 912
Patent
active
056103409
ABSTRACT:
An integrated structure pressure sensor that is powered by induction and read out by induction and includes no integral power source, includes an oscillator circuit that is responsive to pressure variations. The oscillator circuit includes a capacitor having an electrode that is susceptible to induced stress and movement by an external source of pressure. A depletion mode semiconductor is preferably present in the circuit and includes source, drain and gate contacts. A first inductor is coupled between the source and drain contacts and is arranged to respond to an inductively induced voltage to enable current flow between the source and drain contacts. A second inductor in the circuit has a first terminal coupled to the source contact and a second terminal coupled to both the capacitor and the gate contact. The second inductor is arranged to respond to an inductively induced voltage to bias the semi-conductor for conduction. The power induction device is positioned external to the semiconductor structure and induces voltages in the first and second inductors, those voltages causing the circuit to oscillate at a frequency that is dependent upon a pressure level exerted on the capacitor by the external source of pressure. A sense circuit is positioned external to the semiconductor structure and is inductively coupled to the circuit for sensing the frequency of oscillation thereof as an indication of the pressure level.
REFERENCES:
patent: 2642228 (1953-06-01), Machlet
patent: 2753515 (1956-07-01), Rickner
patent: 2938387 (1960-05-01), Hamilton
patent: 3580081 (1971-05-01), Greenberge
patent: 5113868 (1992-05-01), Wise et al.
patent: 5369544 (1994-11-01), Mastrangelo
Carr William N.
Chamarti Subramanyam
Dougherty Elizabeth L.
New Jersey Institute of Technology
Noori Max H.
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