Integrated pressure sensor with double measuring scale and a...

Measuring and testing – Fluid pressure gauge – Electrical

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C073S727000

Reexamination Certificate

active

07578196

ABSTRACT:
In a pressure sensor with double measuring scale: a monolithic body of semiconductor material has a first main surface, a bulk region and a sensitive portion upon which pressure acts; a cavity is formed in the monolithic body and is separated from the first main surface by a membrane, which is flexible and deformable as a function of the pressure, and is arranged inside the sensitive portion and is surrounded by the bulk region; a low-pressure detecting element of the piezoresistive type, sensitive to first values of pressure, is integrated in the membrane and has a variable resistance as a function of the deformation of the membrane; in addition, a high-pressure detecting element, also of a piezoresistive type, is formed in the bulk region inside the sensitive portion and has a variable resistance as a function of the pressure. The high-pressure detecting element is sensitive to second values of pressure.

REFERENCES:
patent: 4766666 (1988-08-01), Sugiyama et al.
patent: 4945769 (1990-08-01), Sidner et al.
patent: 4972716 (1990-11-01), Tobita et al.
patent: 5259248 (1993-11-01), Ugai et al.
patent: 5291788 (1994-03-01), Oohata et al.
patent: 6240785 (2001-06-01), Chapman et al.
patent: 6912759 (2005-07-01), Izadnegahdar et al.
patent: 7418871 (2008-09-01), Moelkner et al.
patent: 2005/0160827 (2005-07-01), Zdeblick et al.
patent: 2005/0208696 (2005-09-01), Villa et al.
patent: 2008/0223143 (2008-09-01), Murari et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Integrated pressure sensor with double measuring scale and a... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Integrated pressure sensor with double measuring scale and a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Integrated pressure sensor with double measuring scale and a... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-4119104

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.