Integrated pressure sensor with double measuring scale and a...

Details Integrated pressure sensor with double measuring scale and a... Integrated pressure sensor with double measuring scale and a...

2008-01-22

2009-08-25

Allen, Andre J (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

C073S727000

Reexamination Certificate

active

07578196

ABSTRACT:
In a pressure sensor with double measuring scale: a monolithic body of semiconductor material has a first main surface, a bulk region and a sensitive portion upon which pressure acts; a cavity is formed in the monolithic body and is separated from the first main surface by a membrane, which is flexible and deformable as a function of the pressure, and is arranged inside the sensitive portion and is surrounded by the bulk region; a low-pressure detecting element of the piezoresistive type, sensitive to first values of pressure, is integrated in the membrane and has a variable resistance as a function of the deformation of the membrane; in addition, a high-pressure detecting element, also of a piezoresistive type, is formed in the bulk region inside the sensitive portion and has a variable resistance as a function of the pressure. The high-pressure detecting element is sensitive to second values of pressure.

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