Integrated pressure sensor unit and solenoid valve unit

Measuring and testing – Fluid pressure gauge – Diaphragm

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Details

73756, G01L 904, G01L 1906

Patent

active

059258268

ABSTRACT:
A compact pressure detecting apparatus comprising a pressure sensor unit, having a semiconductor pressure-detecting device provided with gauge resistance, integrated with a solenoid valve unit for controlling a channel of a measurement fluid into the body of the apparatus. The semiconductor pressure-detecting device partitioned a sensor vessel into a reference pressure chamber and a measurement fluid introduction chamber the measurement fluid introduction chamber can communicate with an environment outside of the pressure sensor unit the pressure-detecting device has a base with a through-hole, on which an electronic circuit and the pressure sensor are mounted. The pressure detecting apparatus also includes a solenoid valve unit; a port portion having a plunger storing portion with an opening at one end, a first intake channel for communicating the plunger storing portion with an environment outside of the solenoid valve unit which introduces a first measurement fluid, a second intake channel for communicating the plunger storing portion with an environment outside of the solenoid valve unit which introduces a second measurement fluid, and a discharge channel for communicating the plunger storing portion with the measurement fluid introduction chamber. The pressure sensor unit and the solenoid unit are integrated into one body by joining the base with the port portion so that the through-hole of the base communicates with the discharge channel of the port portion.

REFERENCES:
patent: 4644116 (1987-02-01), Miyakawa
patent: 5747694 (1998-05-01), Baba et al.

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