Measuring and testing – Fluid pressure gauge – Electrical
Reexamination Certificate
2006-10-10
2006-10-10
Lefkowitz, Edward (Department: 2855)
Measuring and testing
Fluid pressure gauge
Electrical
C073S753000
Reexamination Certificate
active
07117747
ABSTRACT:
A technique for manufacturing an integrated pressure sensor includes a number of steps. Initially, a substrate with conductive electrical traces located on first and second sides of the substrate is provided. A plurality of compensation circuits are positioned in an array on the first side of the substrate in electrical contact with one or more of the conductive electrical traces on the first side of the substrate. A plurality of pressure sensors are positioned on the second side of the substrate in electrical contact with one or more of the conductive electrical traces on the second side of the substrate. Each one of the sensors is associated with one of the compensation circuits to form a plurality of pressure sensor-compensation circuit pairs. The substrate includes conductive vias to electrically connect each of the sensor-compensation circuit pairs. Each of the compensation circuits provides temperature compensation for an associated one of the sensors. The sensor-compensation circuit pairs are calibrated and singulated for final packaging.
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Borzabadi Hamid R.
Koglin Dennis M.
Long Stephen P.
Vas Timothy A.
Bonanto George P
Delphi Technologies Inc.
Funke Jimmy L.
Lefkowitz Edward
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