Integrated pressure sensor

Details Integrated pressure sensor Integrated pressure sensor

1984-05-31

1985-11-05

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

338 4, G01L 906

Patent

active

045506124

ABSTRACT:
In an integrated pressure sensor, a silicon chip for pressure detection and a substrate for supporting the silicon chip are made of the same material, the silicon chip has a thin diaphragm portion and a peripheral fixed portion thicker than the diaphragm portion, and the silicon chip is bonded to the substrate through a thin insulating film.

REFERENCES:
patent: 4121334 (1978-10-01), Wallis

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