Fishing – trapping – and vermin destroying
Patent
1988-08-05
1989-07-11
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437 2, 357 30, 357 55, 357 58, B01L 2714
Patent
active
048472107
ABSTRACT:
An improved means and method for forming an optical sensor within an integrated circuit structure is described. An epi-coated semiconductor wafer is masked and a cavity etched through the epi-layer to the underlying substrate. A dielectric sidewall is formed on the cavity sidewall and a substantially intrinsic semiconductor region, preferably grown by selective epitaxy, to refill the cavity. The upper surface of the intrinsic region is then heavily doped and contacted by a low resistance polysilicon layer which is substantially transparent to incoming light. The method forms a high sensitivity PIN photo-sensor having a thick space-charge region for efficient capture of the hole-electron pairs produced by the incoming light. The fabrication techniques are compatible with the processing requirements for other integrated circuit devices formed on the same chip and to which the PIN device is coupled without wire bonds, tabs, bumps or the like.
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Casteel Carroll M.
Hwang Bor-Yuan
Mastroianni Sal T.
Barbee Joe E.
Handy Robert M.
Hearn Brian E.
Motorola Inc.
Nguyen Tuan
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