Integrated photodetector-amplifier device

Details Integrated photodetector-amplifier device Integrated photodetector-amplifier device

1985-02-11

1988-09-13

Larkins, William D.

357 16, 357 22, 357 41, H01L 2714, H01L 3300

Patent

active

047713259

ABSTRACT:
An integrated photodetector-amplifier is described which is planar and exhibits excellent circuit characteristics including low input capacitance, high speed, and high sensitivity. Also, certain self-alignment features and a planar technology made fabrication of the circuits simpler and easier than most such circuits.

REFERENCES:
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patent: 4438447 (1984-03-01), Copeland, III
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patent: 4517581 (1985-05-01), Thompson
patent: 4544938 (1985-10-01), Scholl
patent: 4625225 (1986-11-01), Goodfellow et al.
patent: 4625226 (1986-11-01), Antell
IEEE Transactions on Microwave Theory and Techniques, vol. MTT-30, No. 10, Oct. 1982, U. Koren et al., "Recent Developments in Monolithic Integration of InGaAsP/InP Optoelectronic Devices", pp. 1641-1649.
IEEE Electron Device Letters, vol. EDL-5, No. 7, Jul. 1984, D. Wake et al., "A Self-Aligned In.sub.0.53 Ga.sub.0.47 As Junction Field-Effect Transistor Grown by Molecular Beam Epitaxy", pp. 285-287.

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