Integrated optics waveguide accelerometer with a proof mass adap

Optics: measuring and testing – By particle light scattering – With photocell detection

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25022719, 385 12, 7351401, G01B 902

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06018390&

ABSTRACT:
A sensor, an optical accelerometer, which is sensitive enough for the measurement of nano-g's as well as thousands of g's. The sensor is created by an optical waveguide coil which is secured to a substrate. At one end of the waveguide coil, a mirror reflects the emitting light back into the waveguide coil. Positioned along one side of the substrate, a proof mass is adapted to exert force against and deform the optical waveguide coil during acceleration of the sensor. An identical optical waveguide coil is secured to the opposing side of the substrate with its associated proof mass positioned on the side of the substrate opposite the other side's proof mass. A beamsplitter communicates light into the ends of the two waveguide coils and then a monitor uses the light being emitted from the ends of the coils to measure the g's being applied.

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