Integrated optical waveguide utilizing zinc oxide diffused into

Optical waveguides – Planar optical waveguide – Thin film optical waveguide

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G02B 610, G02B 612

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050955187

ABSTRACT:
An integrated optical waveguide is constructed from a lithium niobate (LiNbO.sub.3) crystal substrate. In preferred embodiments, a diffused layer is formed proximate to one surface of the substrate by sputtering a thin layer of a zinc-related oxide (e.g., ZnO, ZnLiNbO.sub.4, or the like) onto the surface and then annealing the substrate. The resulting concentration of zinc in the diffused layer forms a waveguide having desirable optical propagation characteristics. The substrate is preferably congruent lithium niobate. In particularly preferred embodiments, the substrate is magnesium oxide (MgO) doped lithium niobate.

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