Integrated optical position measuring device and method with ref

Details Integrated optical position measuring device and method with ref Integrated optical position measuring device and method with ref

1990-12-19

1993-02-16

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356356, 385 12, G01B 902

Patent

active

051875454

ABSTRACT:
A position measuring apparatus for measuring the position of an object having an integrated optical circuit on a substrate comprising a first grating for diffracting a light beam into a reference bundle and a measuring bundle. The first grating couples the reference bundle to an input of a coupler and decouples the measuring bundle from the substrate. The measuring bundle is directed to a reflecting element on the object wherein the measuring bundle is reflected from the object. The coupler has means for inputting signals and for outputting signals wherein the input signals are brought into interference. A second grating couples the reflected measuring bundle to another input of the coupler. Detection means detect the outputs of the coupler and generate phase displaced signals representative of the outputs.

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patent: 4955718 (1990-09-01), Michel
Burns et al., "3.times.2 Waveguide Gyroscope Couplers: Theory", IEEE Journal of Quantum Electronics, vol. QE-18, N. 10, Oct. 1982.
Ura et al., "Integrated-Optic Interferometer Position Sensors", IEEE Journal of Lightwave Technology, vol. 7, No. 2, pp. 270-3, Feb. 1989.

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