Integrated optical module including a waveguide and a photorecep

Etching a substrate: processes – Forming or treating optical article

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216 53, 216 95, 216 99, 438 65, 438 68, 438 69, 438 71, 438 72, B02B 600

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059321148

ABSTRACT:
An optical module includes support substrate, an optical waveguide on the support substrate, a photoreception device on the support substrate, an optical path conversion part for converting an optical path of an optical beam guided through the optical waveguide from a first optical path to a second optical path that leads to a photodetection area of said photoreception device, wherein the optical path conversion part is provided on the photodetection device as a part thereof, such that the optical beam emitted from the optical waveguide impinges upon the photodetection area of the photoreception device.

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Patent Abstract of Japan, Pub. No. 05093827, Apr. 16, 1993, Sumitomo Electric Ind. Ltd. Paris Preliminary Search Report, Appln. No. 951410900, Jun. 22, 1998.

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