Integrated optical measurement instruments

Details Integrated optical measurement instruments Integrated optical measurement instruments

1998-07-10

1999-08-24

Evans, F. L.

Optics: measuring and testing

For optical fiber or waveguide inspection

356 51, 356319, 356328, 25033907, 25033908, G01J 302, G01N 2117

Patent

active

059431229

ABSTRACT:
A measuring instrument with a parfocal combination of an ultra-violet to near-infrared (UV-NIR) spectrophotometer and a Fourier Transform Infrared (FTIR) spectrometer is disclosed. The parfocal configuration of metrology tools obviates lateral movement of the sample between two separate measurement instruments. Consequently, the area occupied by the parfocal measuring instrument is reduced. Moreover, throughput is increased because there is no need to reposition the sample to properly align the measurement area for the separate measurements. The measuring instrument also includes an imaging apparatus, such as a camera or microscope ocular, to accurately position the measurement area of the sample. Beam directing elements, such as a mirror and objective lenses, are mounted on a common movable member. The common movable member, which may be, e.g., a linear or rotating turret, moves to properly align the desired beam directing element, thereby selecting the specific metrology mode. In addition, the measurement instrument includes a purging shroud along the FTIR spectrometer optical path to efficiently purge any atmospherical gases that may interfere with the FTIR measurement technique.

REFERENCES:
J.N. Cox et al., "FTIR spectrophotometry for thin film monitors: computer and equipment integration for enhanced capabilities", SPIE vol. 1392 Advanced Techniques for Integrated Circuit Processing (1990), pp. 650-659.
William A. McGahan et al., "Combined Spectroscopic Ellipsometry and Reflectometry for Advanced Semiconductor Fabrication Metrology", SPIE--The International Society for Optical Engineering, SPIE vol. 2877, Oct. 16-17, 1996, Austin, Texas, 10 pages.
Metrology that Measures Up, Apr. 1997, Solid State Technology, p. 83.
Moore Technologies Web Site (http://www.mooretech.com/metrology.htm), Metrogy That Measures Up|, Metrology Systems, 2 pages.
MIR 8000.TM. Modular IR Fourier Spectrometer, Oriel Instruments Brochure, pp. 1-10.
The Illuminator, Midac Corporation Brochure, 2 pages.

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