Optical waveguides – Integrated optical circuit
Reexamination Certificate
2005-06-28
2005-06-28
Ullah, Akm Enayet (Department: 2874)
Optical waveguides
Integrated optical circuit
Reexamination Certificate
active
06912330
ABSTRACT:
A method for forming a hybrid active electronic and optical circuit using a lithography mask. The hybrid active electronic and optical circuit comprising an active electronic device and at least one optical device on a Silicon-On-Insulator (SOI) wafer. The SOI wafer including an insulator layer and an upper silicon layer. The upper silicon layer including at least one component of the active electronic device and at least one component of the optical device. The method comprising projecting the lithography mask onto the SOT waver in order to simultaneously pattern the component of the active electronic device and the component of the optical device on the SOI wafer.
REFERENCES:
patent: 4422088 (1983-12-01), Gfeller
patent: 4565422 (1986-01-01), Seymour et al.
patent: 4677783 (1987-07-01), Cratsa
patent: 4693547 (1987-09-01), Soref et al.
patent: 4695120 (1987-09-01), Holder
patent: 4728167 (1988-03-01), Soref et al.
patent: 4746183 (1988-05-01), Soref et al.
patent: 4758092 (1988-07-01), Heinrich et al.
patent: 4761620 (1988-08-01), Bar-Joseph et al.
patent: 4787691 (1988-11-01), Lorenzo et al.
patent: 4789642 (1988-12-01), Lorenzo et al.
patent: 4865427 (1989-09-01), Kingston et al.
patent: 4871224 (1989-10-01), Karstensen
patent: 4877299 (1989-10-01), Lorenzo et al.
patent: 4884112 (1989-11-01), Lorenzo et al.
patent: 4917450 (1990-04-01), Pocholle
patent: 4932743 (1990-06-01), Isobe et al.
patent: 4939793 (1990-07-01), Stewart
patent: 4966430 (1990-10-01), Weidel
patent: 5004447 (1991-04-01), Soref
patent: 5013113 (1991-05-01), Soref
patent: 5061027 (1991-10-01), Richard
patent: 5140651 (1992-08-01), Soref et al.
patent: 5153770 (1992-10-01), Harris
patent: 5159700 (1992-10-01), Reid et al.
patent: 5198684 (1993-03-01), Sudo
patent: 5260592 (1993-11-01), Mead et al.
patent: 5354709 (1994-10-01), Lorenzo et al.
patent: 5373570 (1994-12-01), Menigaux et al.
patent: 5400419 (1995-03-01), Heinen
patent: 5420947 (1995-05-01), Li et al.
patent: 5432630 (1995-07-01), Lebby et al.
patent: 5434434 (1995-07-01), Kasahara et al.
patent: 5444567 (1995-08-01), Kataoka
patent: 5459799 (1995-10-01), Weber
patent: 5472914 (1995-12-01), Martin et al.
patent: 5485021 (1996-01-01), Abe
patent: 5502779 (1996-03-01), Magel
patent: 5513289 (1996-04-01), Hosokawa et al.
patent: 5514885 (1996-05-01), Myrick
patent: 5555329 (1996-09-01), Kuper et al.
patent: 5568574 (1996-10-01), Tanguay, Jr. et al.
patent: 5577141 (1996-11-01), Adar et al.
patent: 5605856 (1997-02-01), Goosen et al.
patent: 5625636 (1997-04-01), Bryan et al.
patent: 5625729 (1997-04-01), Brown
patent: 5629838 (1997-05-01), Knight et al.
patent: 5638469 (1997-06-01), Feldman et al.
patent: 5652816 (1997-07-01), Minami et al.
patent: 5682455 (1997-10-01), Kovacic et al.
patent: 5696862 (1997-12-01), Hauer et al.
patent: 5719981 (1998-02-01), Katoh et al.
patent: 5757986 (1998-05-01), Crampton et al.
patent: 5761355 (1998-06-01), Kuper et al.
patent: 5761364 (1998-06-01), Knapp et al.
patent: 5793907 (1998-08-01), Jalali et al.
patent: 5835646 (1998-11-01), Yishimura et al.
patent: 5864642 (1999-01-01), Chun et al.
patent: 5872360 (1999-02-01), Paniccia et al.
patent: 5875271 (1999-02-01), Laughlin
patent: 5878175 (1999-03-01), Sonoda et al.
patent: 5880491 (1999-03-01), Soref et al.
patent: 5894492 (1999-04-01), Welch et al.
patent: 5908305 (1999-06-01), Crampton et al.
patent: 5926601 (1999-07-01), Tai et al.
patent: 6002515 (1999-12-01), Mizuuchi et al.
patent: 6016374 (2000-01-01), Adams et al.
patent: 6017681 (2000-01-01), Tsukamoto et al.
patent: 6021248 (2000-02-01), Cornish et al.
patent: 6075908 (2000-06-01), Paniccia et al.
patent: 6088496 (2000-07-01), Asghari
patent: 6108478 (2000-08-01), Harpin et al.
patent: 6111633 (2000-08-01), Albert et al.
patent: 6114994 (2000-09-01), Soref et al.
patent: 6122419 (2000-09-01), Kurokawa
patent: 6163632 (2000-12-01), Rickman et al.
patent: 6166846 (2000-12-01), Maloney
patent: 6169833 (2001-01-01), Goossen et al.
patent: 6177685 (2001-01-01), Teraguchi et al.
patent: 6188818 (2001-02-01), Han et al.
patent: 6208773 (2001-03-01), Wickham et al.
patent: 6215577 (2001-04-01), Koehl et al.
patent: 6221565 (2001-04-01), Jain et al.
patent: 6222689 (2001-04-01), Higuchi et al.
patent: 6233070 (2001-05-01), Lu et al.
patent: 6236778 (2001-05-01), Laughlin
patent: 6242324 (2001-06-01), Kub et al.
patent: 6259841 (2001-07-01), Bhagavatula
patent: 6268953 (2001-07-01), Maloney
patent: 6282357 (2001-08-01), Kadota et al.
patent: 6289699 (2001-09-01), Kewitsch et al.
patent: 6316281 (2001-11-01), Lee et al.
patent: 6411642 (2002-06-01), Mazed
patent: 6596610 (2003-07-01), Kuwabara et al.
patent: 2001/0031112 (2001-10-01), Frish et al.
patent: 2001/0031113 (2001-10-01), Frish et al.
patent: WO-97/43676 (1997-11-01), None
patent: WO-98/35253 (1998-08-01), None
patent: WO-99/09514 (1999-02-01), None
patent: WO-99/12062 (1999-03-01), None
patent: WO-99/34485 (1999-07-01), None
patent: WO-00/10039 (2000-02-01), None
patent: WO-00/73822 (2000-02-01), None
patent: WO-00/22703 (2000-04-01), None
patent: WO-00/25156 (2000-05-01), None
patent: WO-00/49451 (2000-08-01), None
patent: WO-00/58776 (2000-10-01), None
patent: WO-01/01530 (2001-01-01), None
patent: WO-01/06212 (2001-01-01), None
patent: WO-01/20372 (2001-03-01), None
patent: WO-01/27670 (2001-04-01), None
patent: WO-01/29598 (2001-04-01), None
patent: WO-01/50166 (2001-07-01), None
patent: WO-01/56119 (2001-08-01), None
patent: WO-01/67172 (2001-09-01), None
Michael C. Parker et al., Applications of Active Arrayed-Waveguide Gratings in Dynamic WDM Networking and Routing, Journal of Lighwave Technology, vol. 18, No. 12, Dec. 2000.
Bardia Pezeshki et al., Vertical Cavity Devices as Wavelength Selective Waveguides, Journal of Lightwave Technology, vol. 12, No. 10, Oct. 1994.
Lucent Technologies, Bell Labs Innovations, Arrayed Waveguide Grating Multiplexer/Demultiplexer, Jan. 2000.
Robert Shi and Tomasz Jannson, Optical Interconnection Foundations and Applications, Chapter 5, Integrated Optical Waveguide Routing—Micro-optics, Artech House, pp. 141-225.
Amalia N. Miliou et al., A 1.3 μm Directional Coupler Polarization Splitter by Ion Exchange, Journal of Lightwave Technology, vol. 11, No. 2, Feb. 1993.
Gijs J. M. Krijnen et al., A New Method for the Calculation of Propagation constants and Field Profiles of Guided Modes of Nonlinear Channel Waveguides Based on the Effective Index Method, Journal of Lightwave Technology, vol. 12, No. 9, Sep. 1994.
SiOptical Inc.
Ullah Akm Enayet
LandOfFree
Integrated optical/electronic circuits and associated... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Integrated optical/electronic circuits and associated..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Integrated optical/electronic circuits and associated... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3520242