Integrated optical acceleration sensor

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

73653, 25022721, G01P 1508, H01J 516

Patent

active

054371864

ABSTRACT:
An acceleration sensor for measuring accelerations in at least one direction, the sensor including: a plate-like seismic mass which responds to accelerations, is disposed within a fixed frame and is movably fastened to the frame by at least one web extending between the mass and the frame. A first light waveguide for receiving a light beam from a light source, is disposed on a surface of the seismic mass so that a light beam passing therethrough is deflected as a function of movement of the seismic mass, and a second light waveguide is disposed on a surface of the fixed frame opposite an end of the first light waveguide for coupling the light beam to a detector for detecting deflections of the light beam as a measure of detected acceleration by the sensor. Preferably, the first and second light waveguides comprise planar light conductor paths or strips and the mass, webs and frame are all formed of silicon. The mass may be fastened to the frame by webs along only one edge surface of the mass in the form of a cantilever, or by two webs at opposite edge surfaces of the mass. According to a further and slightly different embodiment, the mass may be fastened to the frame by four webs to provide movement in two different directions.

REFERENCES:
patent: 3789674 (1974-02-01), Anderson et al.
patent: 4353259 (1982-10-01), Schneider, Jr.
patent: 4428234 (1984-01-01), Walker
patent: 4477732 (1984-10-01), Mausner
patent: 4595830 (1986-06-01), McMahon
patent: 4800267 (1989-01-01), Freal et al.
patent: 4848871 (1989-07-01), Seidel et al.
patent: 4860586 (1989-08-01), Miers et al.
patent: 4948960 (1990-08-01), Simms et al.
patent: 5276322 (1994-01-01), Carome
Roylance et al, "A Batch-Fabricated Silicon Accelerometer", IEEE Transactions on Electron Devices, vol. ED-26, No. 12, Dec. 1979.
Gerlach-Meyer, "Micromachined Capacitive Accelerometer", Sensors and Actuators, A, 25-27, 1991, pp. 555-558.
Soviet Inventions Illustrated, vol. W., No. 4, Issued Apr. 3, 1975, p. 8, SU 420935.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Integrated optical acceleration sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Integrated optical acceleration sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Integrated optical acceleration sensor will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-728225

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.