Optical waveguides – Planar optical waveguide – Thin film optical waveguide
Reexamination Certificate
2006-05-02
2006-05-02
Bovernick, Rodney (Department: 2874)
Optical waveguides
Planar optical waveguide
Thin film optical waveguide
C385S014000, C430S321000, C430S322000
Reexamination Certificate
active
07039289
ABSTRACT:
Processes for fabricating integrated optics devices are provided. According to one process, a photosensitive sol-gel glass material including a volatile photosensitizer is prepared. A film of the sol-gel is then produced on a substrate. The film is then imprinted with an image of an optical device by exposing the photosensitive sol-gel film to light energy patterned in the negative or positive image of the desired device, thereby photolyzing photosensitizer within the exposed portion in proportion to the amount of light energy delivered. The image of the written optical device is then fixed in the exposed film, thereby forming a planar device layer having an embedded optical device. The photoinduced refractive index change between the optical device and the surrounding region is preferably greater than or equal to 0.001. A variety of passive and active integrated optic devices may be fabricated using the disclosed processes and are also described.
REFERENCES:
patent: 4725110 (1988-02-01), Glenn et al.
patent: 5080503 (1992-01-01), Najafi et al.
patent: 5080962 (1992-01-01), Hench
patent: 5151958 (1992-09-01), Honkanen
patent: 5265185 (1993-11-01), Ashley
patent: 5360834 (1994-11-01), Popall et al.
patent: 5574807 (1996-11-01), Snitzer
patent: 5585640 (1996-12-01), Huston et al.
patent: 5620495 (1997-04-01), Aspell et al.
patent: 5972516 (1999-10-01), Kanacko et al.
patent: 6054253 (2000-04-01), Fardad et al.
patent: 6103363 (2000-08-01), Boire et al.
patent: 6115518 (2000-09-01), Calpp
patent: 6158245 (2000-12-01), Savant
patent: 6268089 (2001-07-01), Chandross et al.
patent: 6368775 (2002-04-01), Potter et al.
patent: 2001/0031122 (2001-10-01), Lackritz et al.
patent: 2001/0041025 (2001-11-01), Farahi
patent: 2001/0047665 (2001-12-01), Zhang et al..
patent: 2003/0210881 (2003-11-01), Mendoza et al.
patent: 2218273 (1999-04-01), None
patent: 03-013907 (1991-01-01), None
patent: WO 99/06873 (1999-02-01), None
Mendoza E.A., Ferrell D.J., Syracuse S.J., Khalil A.N., Lieberman R.A., “Photolithography of Integrated Optice Devices in Sol-Gel Glasses,” Proc. SPIE-Int. Soc. Opt. Eng., vol. 2288, pp. 580-588 (1994).
Najafi, S.I., Touam T., Sara R., Andrews M.P., Fardad M.A., “Sol-Gel Glass Waveguide and Grating on Silicon,” Journal of Lightwave Technology, vol. 16, No. 9 (1998).
McEntee J. “Sol-Gel Devices ‘will meet cost targets of fibre to the home’,” Opto & Laser Europe, Issue 31, p. 5 (1996).
Coudray, P., Chisham, J., Malek-Tabrizi, A., Li, C.-Y., Andrews, M.P., Peyghambarian, N., Najafi, S.I., “Ultraviolet Light Imprinted Sol-Gel Silica Glass Waveguide Devices on Silicon,” Optics Comm., 128(1-3) 19-22 (1996).
Coudray, P., Chisham, J., Andrews, M.P., Najafi, S.I., “Ultraviolet Light Imprinted Sol-Gel Silica Glass Low-Loss Waveguides For Use At 1.55 μm,” Opt. Eng. 36(4) 1234-1240 (1997).
Fardad, A., Andrews, M., Milova, G., Malek-Tabrizi A., Najafi, I., “Fabrication of Ridge Waveguides:: A New Solgel Route,” Applied Optics, vol. 37, No. 12., pp. 2429-2434 (1998).
Najafi, S.I., Armenise, M.N., “Organoaluminophosphate sol-gel silica glass thin films for integrated optics,” Proc. SPIE-Int. Soc. Opt. Eng., vol. 2997 pp. 79-84 (1997).
Cindrich I., Lee, S.H., Sutherland, R. L., “Adapting Existing E-Beam Writers to Write HEBS-Glass Gray Scale Masks,” Proc. SPIE-Int. Soc. Opt. Eng., vol. 3633 pp. 35-45 (1999).
Kley, E-B., “Continuous Profile Writing by Electron and Optical Lithography,” Microelectronic Engineering, 34 pp. 261-298 (1997).
Syms, R.R.A., “Silica-On Silicon Integrated Optics,” Advances in Integrated Optics, pp. 121-150 (1994).
Najafi, S.I., Andrews, M.P., Fardad, M.A., Milova, G., Tahar, T., Coudray, P., “UV-Light Imprinted Surface, Ridge and Buried Sol-Gel Glass Waveguides and Devices on Silicon,” Proc. SPIE-Int. Soc. Opt. Eng., vol. 2954 pp. 100-104 (1996).
Holmes, A.S., Syms, R.R.A., “Fabrication of Low-Loss Channel Waveguides in Sol-Gel Glass on Silicon Substrates,” Advanced Materials in Optics, Electro-Optics and Communication Technologies (1995).
Holmes, A.S., Syms, R.R.A., Li, M., Green M., “Fabrication of Buried Channel Waveguides on Silicon Substrates Using Spin-On Glass,” Applied Optics, vol. 32, No. 25 pp. 4916-4921 (1993).
Kawachi, M., “Silica Waveguides on Silicon and Their Application to Integrated-Optic Components,” Optical and Quantum Electronics, vol. 22, No. 5, pp. 391-416 (1990).
Ballato, J., Dejneka, M., Riman,R.E., Snitzer, E., Zhou, W., “Sol-Gel Synthesis of Rare-Earth-Doped Fluoride Glass Thin Films,” Journal of Materials Research, vol. 11, No. 4., pp. 841-849 (1996).
Yang, L., Saavedra, S.S., Armstrong, N.R., Hayes, J., “Fabrication and Characterization of Low-Loss, Sol-Gel Planar Waveguides,” Anal. Chem. vol. 66, No. 8, pp. 1254-1263 (1994).
Schmidt, H., “Thin Films, the Chemical Processing up to Gelation,” Structure and Bonding, vol. 77, pp. 119-151 (1992).
Chisham, J.E., Andrews, M.P., Li, C.-Y., Najafi, S.I., Makek-Tabrizi, A., “Gratings Fabrication by Ultraviolet Light Imprinting and Embossing in a Sol-Gel Silica Glass,” Proc. SPIE-Int. Soc. Opt. Eng., vol. 2695, pp. 52-56 (1996).
Svalgaard, M., Poulsen, C.V., Bjarklev A., Poulsen, O., “Direct UV Writing of Buried Singlemode Channel Waveguides in Ge-Doped Silica Films,” Electronic Letters, vol. 30, No. 17, pp. 1401-1403 (1994).
Andrews, M.P., Kanigan T., Najafi, S.I., “Auto-Embossed Bragg Gratings From Self-Organizing Polymers: Chemical Tuning of Periodicity and Photoinduced Anisotrophy,” Proc. SPIE-Int. Soc. Opt. Eng., vol. 2695, pp. 4-15 (1996).
Najafi, S. I., Li, C.-Y., Chisham, J., Andrews, M.P., Coudray, P., Malek-Tabrizi, A., Peyghambarian, N., “Ultraviolet Light Imprinted Sol-Gel Silica Glass Channel Waveguides on Silicon,” Proc. SPIE-Int. Soc. Opt. Eng., vol. 2695, pp. 38-41 (1996).
Brinker, C.J., Scherer, G.W., “The Physics and Chemistry of Sol-Gel Processing,” Sol-Gel Science, Academic Press, Inc. pp. 864-1879.
Li, C.-Y., Chisham, J., Andrews, M., Najafi, S.I., Mackenzie, J.D., Peyghambarian, N., “Sol-Gel Integrated Optical Coupler by Ultraviolet Light Imprinting,” Electronic Letters, vol. 31, No. 4, pp. 271-272 (1995).
Andrews, M.P., “An Overview of Sol Gel Guest-Host Materials Chemistry for Optical Devices,” Proc. SPIE-Int. Soc. Opt. Eng., vol. 2997, pp. 48-59 (1997).
Rösch, O.S., Bernhard, W., Müller-Fiedler, R., Dannberg, P., Bräuer, A., R. Buestrich, R., Popall, M., “High Performance Low Cost Fabrication Method for Integrated Polymer Optical Devices,” Proc. SPIE-Int. Soc. Opt. Eng., Vol. 3799, pp. 214-224.
Roscher, C., Buestrich R., Dannberg, P., Rösch, O., Popall, M., “New Inorganic-Organic Hybrid Polymers for Integrated Optics,” Mat. Res. Soc. Symp. Proc. vol. 519, pp. 239-244 (1998).
Mendoza, E.A., “Photolithography of Integrated Optic Devices in Porous Glasses,” UMI Dissertation Services (1992).
Mendoza, A., Wolkow, E., Sunil, D., Wong, P., Sokolow, J., Rafailovich, M., den Boer, M., Gafney, H., “A Comparison of Iron Oxides Photodeposited in Porous Vycor Glass and Tetramethoxysilane/Methanol/Water Xerogels,” Langmuir, vol. 7, No. 12, pp. 993-4009 (1991).
Che, T., Soskey, P., Banash, M., Caldwell, M., McCallum, I., Mininni, R., Warden V., “Optimization of a Gel Derived Gradient Index Material,” Proc. SPIE-Int. Soc. Opt. Eng., vol. 1758, pp. 193-204 (1992).
Gafney, H., “A Photochemical Approach to Integraged Optics,” J. Macromol. Sci.-Chem. vol. A27(9-11), pp. 1187-1202 (1990).
Simmons, K., Stegeman, G., Potter, B., Simmons, J., “Photosensitivity of Solgel-Derived Germanoscilicate Planar Waveguides,” Optics Letters, vol. 18, No. 1, pp. 25-27 (1993).
Mendoza, E., Gafney, H., “Photolithography of Integrated
Dabby Frank W.
Kempen Lothar U.
Mendoza Edgar A.
Bovernick Rodney
Day Jones
Optinetrics, Inc.
Pak Sung
LandOfFree
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