Optical waveguides – Planar optical waveguide – Thin film optical waveguide
Reexamination Certificate
2007-10-16
2007-10-16
Font, Frank G. (Department: 2883)
Optical waveguides
Planar optical waveguide
Thin film optical waveguide
C385S014000, C385S037000
Reexamination Certificate
active
11386515
ABSTRACT:
A photosensitive sol-gel film containing an organometallic photosensitizer is deposited on the oxide containing surface layer of a silicon substrate. A pattern of white or ultra violet light incident to the photosensitive sol-gel film results in the unbinding of the photosensitizer from the exposed regions of the sol-gel film. A subsequent succession of first and second heating steps results in, first, the removal of the photo sensitizer constituents from the exposed regions of the sol-gel film and, second, the removal of the organic constituents from the exposed regions, resulting in regions doped with a metal oxide with non linear optical properties, such as semicondutive, etc. properties. Optical switches, couplers, waveguides, splitters, interferometers wavelength division multiplexer, Bragg gratings and more can be fabricated. A glass substrate also may be employed, instead of a silicon, in which case a separate silicon oxide surface layer is unnecessary.
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Kempen Lothar U.
Lieberman Robert A.
Mendoza Edgar A.
El-Shammaa Mary
Font Frank G.
Jones Day
Optinetrics, Inc.
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