Integrated monolithic tri-axial micromachined accelerometer

Details Integrated monolithic tri-axial micromachined accelerometer Integrated monolithic tri-axial micromachined accelerometer

2007-08-21

2007-08-21

Williams, Hezron (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S510000, C073S514010, C073S514160

Reexamination Certificate

active

11363293

ABSTRACT:
A monolithic integrated 3-axis accelerometer chip includes a single crystal substrate, the substrate including at least one single crystal membrane layer portion. A single sensor microstructure made from the single crystal membrane senses acceleration in each of the three orthogonal directions. At least one electronic circuit can also be disposed on the chip, such as a circuit for driving, detecting, controlling and signal processing.

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