Integrated monolithic gyroscopes/accelerometers with logic circu

Details Integrated monolithic gyroscopes/accelerometers with logic circu Integrated monolithic gyroscopes/accelerometers with logic circu

1991-12-19

1994-05-24

Swann, Tod R.

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

73517AV, 73517R, G01P 904

Patent

active

053138350

ABSTRACT:
A multi-axes gyroscope, a single axis gyroscope and a three axis accelerometer are formed on a single semiconductor substrate, along with and MPU. The gyroscopes provide sensing for rotation about three mutually orthogonal axes and the accelerometer provides sensing of acceleration along the three axes. The MPU controls and drives the gyroscopes and accelerometer and provides a continuous indication of position.

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patent: 5115291 (1992-05-01), Stokes
patent: 5121180 (1992-06-01), Beringhause et al.

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