Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – For high frequency device
Patent
1995-10-26
1997-11-18
Tran, Minh-Loan
Active solid-state devices (e.g., transistors, solid-state diode
Housing or package
For high frequency device
257275, 257276, 257277, 257707, 333247, H01L 2334
Patent
active
056891385
ABSTRACT:
A semiconductor device for microwave frequencies with a substrate which is provided at a first side with a semiconductor element, a passive element, and a pattern of conductive elements, while the opposed, second side is provided with a metallization which is connected to the elements present on the first side through windows formed in the substrate. The substrate consists of a silicon layer which is present on a layer of insulating material, the semiconductor element being formed in the silicon layer, and the metallization being provided on that side of the layer of insulating material which is remote from the silicon layer. The silicon layer may here have a very small thickness of, for example, 0.1 to 0.2 .mu.m. In such a thin silicon layer, bipolar and field effect transistors capable of processing signals of microwave frequencies can be formed. Since the silicon layer is thin, the influence of the conductivity of silicon on passive elements is small.
REFERENCES:
patent: 4418470 (1983-12-01), Naster et al.
patent: 4956697 (1990-09-01), Kobiki et al.
patent: 5063177 (1991-11-01), Geller et al.
patent: 5449953 (1995-09-01), Nathanson et al.
Dekker Ronald
Maas Henricus G. R.
Van Den Einden Wilhelmus T. A. J.
Marion Michael E.
Tran Minh-Loan
U.S. Philips Corporation
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