Integrated microvalve structures with monolithic microflow contr

Details Integrated microvalve structures with monolithic microflow contr Integrated microvalve structures with monolithic microflow contr

1993-07-28

1995-05-23

Michalsky, Gerald A.

Fluid handling

Processes

25112901, 25112906, 251368, F16K 3102

Patent

active

054172357

ABSTRACT:
Micromachined microvalves are held both open and closed electrostatically to maintain uniform gas microflow and improve closure characteristics. A microflow controller containing such a valve is combined with a predetermined restricted flow path. Multiple valve/restrictive flow path combinations are integrated on a binary flow path basis. Single and/or multiple valve actuation provides precise but variable flow control. Temperature and pressure sensors can be integrally included. Various valve and controller configurations, and methods of controlling them and forming them, are disclosed.

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