Fluid handling – Line condition change responsive valves – Pilot or servo controlled
Reexamination Certificate
2007-11-27
2007-11-27
Krishnamurthy, Ramesh (Department: 3753)
Fluid handling
Line condition change responsive valves
Pilot or servo controlled
C137S015180, C137S487500, C251S129010, C251S331000
Reexamination Certificate
active
11021751
ABSTRACT:
An integrated microvalve has a substrate, a first function layer applied to the substrate, and a second function layer applied to the first function layer, the first function layer being designed as a diaphragm in at least one valve area, the second function layer being removed in the valve area and in a fluid discharge area, and an anvil connected essentially only to the diaphragm being exposed from the substrate in the valve area, a plate being applied to the second function area to form a valve space.
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Pinter Stefan
Pirk Tjalf
Kenyon & Kenyon LLP
Krishnamurthy Ramesh
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