Coherent light generators – Particular temperature control – Heat sink
Patent
1991-03-26
1993-11-23
Epps, Georgia Y.
Coherent light generators
Particular temperature control
Heat sink
372 34, 372 35, H01S 319
Patent
active
052651134
ABSTRACT:
Integrated microsystem comprising electrical and nonelectrical, particularly optical functions in a laser system, wherein a base comprising anisotropically etchable semiconducting material on which etching structures for receiving optical and/or electro-optical and electrical/electronic and/or fluidic and/or mechanical elements or their mountings are arranged in predetermined distances and/or levels, as well as integrated switching circuits, and that at least a part of the optical, electro-optical or mechanical elements or their mounting is controllable and movable electrically in such a way that its position relative to the base is actively changeable, and that at least one sensor is provided which determines the effect of the position change on the function of at least a part of a microsystem and supplies a signal for repeated readjustment (self-adjusting) of optical elements and their mounting.
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Angell et al., "Mikromechanik aus Silicium", Spektrum der Wissenschaft, Jun. 1983, p. 38.
Brady, "Fabrication Processes for a Silicon Substrate Package for Integrated GaAs Laser Arrays", J. Electrochem. Soc. Solid State Science and Technology, Oct. 1978, pp. 1642-1647, vol. 125, No. 10.
Halldorsson Thorsteinn
Kroy Walter
Peuser Peter
Seidel Helmut
Zeller Paul
Epps Georgia Y.
Messerschmitt-Bolkow-Blohm GmbH
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