Integrated microelectronic device

Details Integrated microelectronic device Integrated microelectronic device

1995-06-06

1996-10-29

Arana, Louis M.

Electric lamp and discharge devices

Discharge devices having a multipointed or serrated edge...

313336, 313351, H01J 100

Patent

active

055699731

ABSTRACT:
The present invention relates generally to a new integrated Microelectronic Device and a method for making the same. Microelectronic Devices require several unique three dimensional structures: a sharp field emission tip, accurate alignment of the tip inside a control grid structure in a vacuum environment, and an anode to collect electrons emitted by the tip. Also disclosed is a new structure and a process for forming diodes, triodes, tetrodes, pentodes and other similar structures. The final structure made can also be connected to other similar devices or to other electronic devices.

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