Integrated micro thermistor type flow control module

Details Integrated micro thermistor type flow control module Integrated micro thermistor type flow control module

1998-02-19

1999-11-02

Lee, Kevin

Valves and valve actuation

Heat or buoyancy motor actuated

25112906, F16K 3102

Patent

active

059754850

ABSTRACT:
An integrated micro thermister type flow control module in which, when a fluid enters the integrated module past a fluid channel and a suspended microstructure into a thermally-driven microvalve zone, the latter utilizes heat actuation to drive a silicon microbridge with mesa to open a linear proportional flow microvalve. A thermister type flow sensing unit is disposed in the fluid channel to sense the flow amount. The sensing unit is synchronously made with the microvalve and the silicon microbridge structure in an integration process so as to reduce manufacturing steps and minimize the size of the module.

REFERENCES:
patent: 5058856 (1991-10-01), Gordon et al.
patent: 5323999 (1994-06-01), Bonne et al.
patent: 5529279 (1996-06-01), Beatty et al.
patent: 5785295 (1998-07-01), Tsai

Affiliated with

Also associated with

Rating

Integrated micro thermistor type flow control module does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Integrated micro thermistor type flow control module, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Integrated micro thermistor type flow control module will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2124751