Valves and valve actuation – Heat or buoyancy motor actuated
Patent
1998-01-13
1999-12-21
Lee, Kevin
Valves and valve actuation
Heat or buoyancy motor actuated
25112906, 251118, 251368, F16K 3102
Patent
active
060038330
ABSTRACT:
An integrated micro pressure-resistant flow control module in which, when a fluid enters the integrated module past a pressure-resistant fluid channel and a suspended microstructure into a thermally-driven microvalve zone, the latter utilizes heat actuation to drive a silicon microbridge with mesa to open a linear proportional flow microvalve. A pressure-resistant flow sensing unit is disposed before the fluid channel to sense the flow amount. The flow sensing unit has a micro-suspending arm of pressure-resistant material located vertically at the fluid entrance of the module. The momentum of the fluid is thereof vertical to the micro-uspending arm, and the flow value is obtained by the deflection of the micro-suspending arm which changes the resistance value. The sensing unit is synchronously made with the microvalve and the silicon microbridge structure in an integration process so as to reduce manufacturing steps and minimize the size of the module.
REFERENCES:
patent: 5058856 (1991-10-01), Gordon et al.
patent: 5161774 (1992-11-01), Engelsdorf et al.
patent: 5529279 (1996-06-01), Beatty et al.
patent: 5785295 (1998-07-01), Tsai
Chou Min-Chieh
Tasi Ming-Jye
Industrial Technology Research Institute
Lee Kevin
LandOfFree
Integrated micro pressure-resistant flow control module does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Integrated micro pressure-resistant flow control module, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Integrated micro pressure-resistant flow control module will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-497476