Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – Frequency of cyclic current or voltage
Patent
1986-12-01
1988-12-13
Corbin, John K.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
Frequency of cyclic current or voltage
350521, 324 61R, 356358, 356401, G02B 702, G02B 2124, G01B 1102, G01R 2726
Patent
active
047906421
ABSTRACT:
Metrology for a microlithographic objective reducing lens 10 is integrated into a metrology block 20 secured to a lower region of the barrel 15 for lens 10. Block 20 has a central opening 27 around a lowermost element 11 of lens 10; and block 20 mounts distance detectors 28 around central opening 27, a pair of microscope objectives 30 and 31, and a pair of X and Y mirrors 40 and 41.
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Bruning John H.
Siddell Graham J.
Corbin John K.
GCA Corporation/Tropel Division
Kachmarik Ronald M.
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