Integrated metrology for microlithographic objective reducing le

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – Frequency of cyclic current or voltage

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350521, 324 61R, 356358, 356401, G02B 702, G02B 2124, G01B 1102, G01R 2726

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active

047906421

ABSTRACT:
Metrology for a microlithographic objective reducing lens 10 is integrated into a metrology block 20 secured to a lower region of the barrel 15 for lens 10. Block 20 has a central opening 27 around a lowermost element 11 of lens 10; and block 20 mounts distance detectors 28 around central opening 27, a pair of microscope objectives 30 and 31, and a pair of X and Y mirrors 40 and 41.

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