Measuring and testing – Instrument proving or calibrating – Displacement – motion – distance – or position
Reexamination Certificate
2007-04-19
2011-12-20
Larkin, Daniel (Department: 2856)
Measuring and testing
Instrument proving or calibrating
Displacement, motion, distance, or position
C073S504140, C073S514320, C324S750300
Reexamination Certificate
active
08079246
ABSTRACT:
The present invention provides a device for in-situ monitoring of material, process and dynamic properties of a MEMS device. The monitoring device includes a pair of comb drives, a cantilever suspension comprising a translating shuttle operatively connected with the pair of comb drives, structures for applying an electrical potential to the comb drives to displace the shuttle, structures for measuring an electrical potential from the pair of comb drives; measuring combs configured to measure the displacement of the shuttle, and structures for measuring an electrical capacitance of the measuring combs. Each of the comb drives may have differently sized comb finger gaps and a different number of comb finger gaps. The shuttle may be formed on two cantilevers perpendicularly disposed with the shuttle, whereby the cantilevers act as springs to return the shuttle to its initial position after each displacement.
REFERENCES:
patent: 7152474 (2006-12-01), Deb et al.
patent: 7573022 (2009-08-01), Choo et al.
patent: 2004/0113647 (2004-06-01), Deb et al.
Choo Hyuck
Demmel James
Garmire David
Govindjee Sanjay
Muller Richard S.
Kilpatrick Townsend and Stockton LLP
Larkin Daniel
The Regents of the University of California
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