Integrated mask and method and apparatus for manufacturing...

Coating processes – Electrical product produced – Fluorescent or phosphorescent base coating

Reexamination Certificate

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Details

C427S069000, C427S282000, C118S721000

Reexamination Certificate

active

07396558

ABSTRACT:
An integrated mask including a plurality of deposition masks, each deposition mask having an array of deposition apertures formed in accordance with a deposition pattern; and a base plate having a plurality of openings on which the deposition masks are arranged is provided. The deposition mass are retained to the base plate by engaging unit in a disengageable manner, and alignment marks used for positioning the deposition masks on the base plate are formed on the base plate. In addition a method and apparatus for fabricating the integrated mask, a method and apparatus for manufacturing an organic EL device using the integrated mask, and an organic EL device are provided.

REFERENCES:
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patent: 4915057 (1990-04-01), Boudreau et al.
patent: 5701055 (1997-12-01), Nagayama et al.
patent: 5904961 (1999-05-01), Tang et al.
patent: 5978094 (1999-11-01), Narabe et al.
patent: 6589382 (2003-07-01), Clark et al.
patent: 6749690 (2004-06-01), Clark
patent: 2001/0019807 (2001-09-01), Yamada et al.
patent: 2002/0190661 (2002-12-01), Duggal et al.
patent: 11-158605 (1999-06-01), None
patent: 2000-113978 (2000-04-01), None

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