Integrated mask and method and apparatus for manufacturing...

Details Integrated mask and method and apparatus for manufacturing... Integrated mask and method and apparatus for manufacturing...

2008-07-08

2008-07-08

Meeks, Timothy (Department: 1792)

Coating processes

Electrical product produced

Fluorescent or phosphorescent base coating

C427S069000, C427S282000, C118S721000

Reexamination Certificate

active

07396558

ABSTRACT:
An integrated mask including a plurality of deposition masks, each deposition mask having an array of deposition apertures formed in accordance with a deposition pattern; and a base plate having a plurality of openings on which the deposition masks are arranged is provided. The deposition mass are retained to the base plate by engaging unit in a disengageable manner, and alignment marks used for positioning the deposition masks on the base plate are formed on the base plate. In addition a method and apparatus for fabricating the integrated mask, a method and apparatus for manufacturing an organic EL device using the integrated mask, and an organic EL device are provided.

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patent: 11-158605 (1999-06-01), None
patent: 2000-113978 (2000-04-01), None

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