Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Magnetic field
Patent
1995-05-30
1996-03-26
Mintel, William
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Magnetic field
257422, 257425, 257426, 257427, H01L 2982, H01L 4300
Patent
active
055023258
ABSTRACT:
A magnetoresistor is monolithically integrated with an active circuit by growing a thin film magnetoresistor on a semiconductor substrate after the substrate has been doped and annealed for the active devices. The magnetoresistor is grown through a window in a mask, with the mask and magnetoresistor materials selected such that the magnetoresistor is substantially non-adherent to the mask. InSb is preferred for the magnetoresistor, Si.sub.3 N.sub.4 for the mask and GaAs for the substrate. The non-adherence allows the mask to be substantially thinner than the magnetoresistor without impairing the removal of the mask after the magnetoresistor has been established.
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Sokolich Marko
Yamasaki Hiroyuki
Yang Huai-Tung
Denson-Low W. K.
Hughes Aircraft Company
Lachman M. E.
Mintel William
Sales M. W.
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