Integrated low-k hard mask

Details Integrated low-k hard mask Integrated low-k hard mask

2007-04-03

2007-04-03

Pham, Thanhha (Department: 2813)

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Of specified material other than unalloyed aluminum

C257S760000, C257S774000

Reexamination Certificate

active

11028884

ABSTRACT:
Embodiments of the invention provide a device with a hard mask layer between first and second ILD layers. The hard mask layer may have a k value approximately equal to the first and/or second ILD layers.

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