Integrated laser ablation deposition system

Details Integrated laser ablation deposition system Integrated laser ablation deposition system

1994-05-10

1996-07-09

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

118727, 118730, 427596, C23C 1400

Patent

active

055340717

ABSTRACT:
A laser ablation deposition system includes a movable platform for supporting ferroelectric target material and a support structure for supporting a thermally sensitive semiconductor substrate within a chamber mounted on a moveable cabinet, and a laser for ablating the material mounted on a support frame along with various control components. The cabinet with the chamber may be moved away from the laser and support frame to allow the chamber to be raised to provide access to the components within the chamber. The system may be used to fabricate a multilayer thin film device using multicomponent oxides.

REFERENCES:
patent: 3797452 (1974-03-01), Dobson
patent: 4714625 (1987-12-01), Chopra
patent: 5015492 (1991-05-01), Venkatesan
patent: 5131752 (1992-07-01), Yu
patent: 5133286 (1992-07-01), Choo
patent: 5207884 (1993-05-01), Char
patent: 5227204 (1993-07-01), Vittoria
patent: 5254832 (1993-10-01), Gartner
patent: 5261961 (1993-11-01), Takasu
patent: 5322817 (1994-06-01), James
Muenchausen, Appl. Phys. Lett. 56(6), 5 Feb. 1990, pp. 578-580.
Shi, Appl. Phys Lett. 59(11), 9 Sep. 1991, pp. 1377-1379.
Miura, Appl. Phys. Lett. 52(12), 21 Mar. 1988, pp. 1008-1010.
Wu, Appl. Phys. Lett. 56(4), 22 Jan. 1990, pp. 400-402.
Chrisey, Pulsed Laser Deposition of Thin Films, John Wiley & Sons, Inc. New York, .COPYRGT. 1994, published Feb. 1, 1994, pp. 38-48 & 300-301.
Pham, J. Vac. Sci Technol. A9(2), Mar./Apr. 1991, pp. 271-273.
Koren, Appl. Phys. Lett. 53(23), 5 Dec. 1988, pp. 2330-2332.

Affiliated with

Also associated with

Rating

Integrated laser ablation deposition system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Integrated laser ablation deposition system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Integrated laser ablation deposition system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1864428