Integrated interference scanning method

Details Integrated interference scanning method Integrated interference scanning method

2006-03-13

2008-09-09

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S511000

Reexamination Certificate

active

07423764

ABSTRACT:
An integrated interference scanning method, mainly used to integrate the respective advantages of VSI and PSI measurements, hereby achieving the characteristic of high precision and limitless measurement range. In particular, the slope correction factor and the displacement correction factor between the VSI measurement and PSI measurement may be utilized to execute the integration calculation of the height data arrays of the VSI and PSI, so that the scanning procedure may be achieved through merely using the wideband light source of the interference scanning system, as such reducing the errors and complexity of the interference scanning system.

REFERENCES:
patent: 5471303 (1995-11-01), Ai et al.

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