Integrated inspection system and defect correction method

Details Integrated inspection system and defect correction method Integrated inspection system and defect correction method

2008-05-13

2008-05-13

Mulpuri, Savitri (Department: 2812)

Semiconductor device manufacturing: process

With measuring or testing

Reexamination Certificate

active

07371590

ABSTRACT:
A system for the inspection of and a process for the correction of defects in a microreplicated optical display film manufacturing process. The process steps of manufacturing a master, a plurality of shims from the master, and a multiplicity of display films from each shim are integrated with a systemic defect identification and correction process. Each primary manufacturing step has its own inspection system and correction process where defect information for that step of the process is fed back and analyzed; and from that analysis the subprocess is adjusted to eliminate or reduce the detected defect. The systemic defect is identified as to its source and then fed back and analyzed in the correction step of the respective subprocess in order to cure the root of the defect.

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