Integrated injection logic structure fabricated by outdiffusion

Metal treatment – Process of modifying or maintaining internal physical... – Chemical-heat removing or burning of metal

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29577C, 29580, 148187, 148188, 357 15, 357 44, 357 46, 357 56, 357 49, 357 90, 357 92, H01L 2122, H01L 2704

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active

041013492

ABSTRACT:
Merged transistor logic integrated circuit wherein the vertical transistor is formed by auto-doping an epitaxial silicon layer for an improved transistor doping profile. Further device improvements are achieved by the incorporation of Schottky diodes into the circuit.

REFERENCES:
patent: 3768150 (1973-10-01), Sloan et al.
patent: 3823353 (1974-07-01), Berger et al.
patent: 3909807 (1975-09-01), Fulton
patent: 3922565 (1975-11-01), Berger et al.
Berger et al., "Base Ring Transistor and Method of Production" I.B.M. Tech. Discl. Bull., vol. 14, No. 1, Jun. 1971, p. 302.
Cook et al., "I.sup.2 L II" Int. Elect. Dev. Tech. Dig., 1975, pp. 284-287.
"Injection Logic's Range . . . . . " Electronics, vol. 48, No. 14, Jul. 10, 1975, pp. 86-89.
Berger et al., "Schottky Transistor Logic" ISSCC Digest of Tech. Papers, 1975, pp. 172-173.

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