Fishing – trapping – and vermin destroying
Patent
1992-11-09
1993-11-09
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437974, 2503384, 250332, 250371, H01L 318
Patent
active
052602257
ABSTRACT:
A method for fabricating an integrated infrared sensitive bolometer having a polycrystalline element whereby an oxide region deposited on silicon nitride covered with a first polysilicon layer which is etched to provide a location for a bolometer element. A second polysilicon layer is deposited and doped to achieve a desired temperature coefficient of resistivity of 1 to 2%/.degree.C. The second polysilicon layer forms an IR sensitive element over the oxide region. Openings are etched in the IR sensitive element to permit an etchant to remove the oxide region resulting in the sensitive element being suspended over a cavity.
REFERENCES:
patent: 4570329 (1986-02-01), Paine et al.
patent: 4574263 (1986-04-01), Liddiard
patent: 4665610 (1987-05-01), Barth
patent: 4724356 (1988-02-01), Daechler
patent: 4766666 (1988-08-01), Sugiyama et al.
patent: 4853669 (1989-08-01), Guckel et al.
patent: 4922116 (1990-05-01), Grinberg et al.
patent: 4948741 (1990-08-01), Hammond et al.
patent: 4965212 (1990-10-01), Aktik
patent: 5010251 (1991-04-01), Grinberg et al.
patent: 5021663 (1991-06-01), Hornbeck
patent: 5059543 (1991-10-01), Wise et al.
Boninsfgni, et al. "Low-Temperature Bolometer Array," Rev. Sci. Instrum. vol. 60, No. 4 Apr. 1989, pp. 661-665.
Haviland Jeffrey S.
Liu Michael S.
Yue Cheisan J.
Bruns Gregory A.
Hearn Brian E.
Honeywell Inc.
Picardat Kevin M.
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