Integrated hybrid silicon-based micro-reflector

Details Integrated hybrid silicon-based micro-reflector Integrated hybrid silicon-based micro-reflector

1998-04-16

1999-06-08

Ben, Loha

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359290, 359224, 359230, 264657, G02B 2600

Patent

active

059108568

ABSTRACT:
A light reflective device including an insulative substrate; a silicon wafer positioned over the insulative substrate and defining an opening and having a flexible beam portion having top and bottom surfaces which extend into the opening; a layer of ferromagnetic material formed over the top surface of the flexible beam portion; a reflector formed over the ferromagnetic layer on the top surface of the flexible beam portion; and a micro-electromagnet mounted on the insulative substrate relative to the opening of the silicon wafer and adapted to produce a magnetic field in response to an applied current which acts on the ferromagnetic layer to cause the bending of the flexible beam portion, ferromagnetic layer and reflector.

REFERENCES:
patent: 4786149 (1988-11-01), Hoenig et al.
patent: 5061049 (1991-10-01), Hornbeck
patent: 5172262 (1992-12-01), Hornbeck
patent: 5331454 (1994-07-01), Hornbeck
patent: 5424866 (1995-06-01), Kikinis
patent: 5579151 (1996-11-01), Cho
patent: 5793519 (1998-08-01), Furlani et al.

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