Integrated high vacuum pumping system

Details Integrated high vacuum pumping system Integrated high vacuum pumping system

2006-11-28

2006-11-28

Rodriguez, William H. (Department: 3746)

Pumps

With condition responsive pumped fluid control

Bypass or relief valve part carried by or carries...

C417S423400, C417S423140

Reexamination Certificate

active

07140847

ABSTRACT:
The present invention relates to the integration of a TMP with the associated bypass line and valves so that a single sub-assembly is created. The housing of the TMP is significantly modified to accommodate the associated equipment necessary for constructing a high-vacuum system.

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