Integrated heater element array

Details Integrated heater element array Integrated heater element array

1976-03-19

1977-07-12

Albritton, C. L.

Electric heating

Heating devices

Combined with diverse-type art device

29580, 156647, 219543, 219552, 219553, 357 56, H05B 100

Patent

active

040356078

ABSTRACT:
A thermal display comprising an array of semiconductor heater mesas having a larger cross-sectional area at the display surface than at the support surface. The preferred structure is in the shape of a truncated, inverted pyramid. The novel method includes forming the inverted heater elements by etching trenches in one surface of the semiconductor substrate and forming the heater mesas at the opposite surface, with the trenches defining the individual mesas.

REFERENCES:
patent: 3574008 (1971-04-01), Rice
patent: 3632970 (1972-01-01), Walkow
patent: 3689357 (1972-09-01), Jordan

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