Integrated heatable sensor

Details Integrated heatable sensor Integrated heatable sensor

1989-05-22

1991-02-12

Williams, Hezron E.

Measuring and testing

Gas analysis

Detector detail

73 25050, G01N 2712

Patent

active

049914243

ABSTRACT:
The invention concerns a sensor construction for, e.g., the measurement of gas concentration, including a sensor element; a heating element arranged in conjunction with the sensor, with which the sensor element can be brought to a temperature above the ambient gas atmosphere temperature; and an electronics circuitry section, with which the desired electrical properties of the sensor element can be measured and the heating element of the sensor can be controlled. According to the invention, the sensor element and the electronics circuitry are placed onto the same planar substrate, and the substrate is processed to have adjacent openings around the sensor element area to the immediate vicinity of the area so that the openings extend through the substrate whereby the sensor area is connected to the surrounding part of the substrate and, then, to the electronics circuitry section, only along thin isthmuses remaining between the openings.

REFERENCES:
patent: 4338281 (1982-07-01), Treitinger et al.
patent: 4377944 (1983-03-01), Hishii et al.
patent: 4580439 (1986-04-01), Manaka
patent: 4674319 (1987-06-01), Muller et al.

Affiliated with

Also associated with

Rating

Integrated heatable sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Integrated heatable sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Integrated heatable sensor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-12767