Integrated gyroscope and temperature sensor

Details Integrated gyroscope and temperature sensor Integrated gyroscope and temperature sensor

2007-12-18

2007-12-18

Williams, Hezron (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504120

Reexamination Certificate

active

11070509

ABSTRACT:
A gyroscope and temperature sensor are formed on a single chip using SOI-MEMS technology. The temperature sensor has an array of resistors to accurately detect the temperature of the gyroscope in temperatures and conditions that can range from extreme heat to extreme cold. The positioning of the gyroscope and temperature sensor on the same chip allow for extremely accurate real-time feedback of the gyroscope's temperature for utilization by a control system.

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M. Kranz et al., “A Single Layer Silicon-On-Insulator MEMS Gyroscope for Wide Dynamic Range and Harsh Environment Applications,” SPIE, 4559, pp. 5-16, Oct. 2001.
M. Kranz, S. Burgett et al., “A Wide Dynamic Range Silicon-On-Insulator MEMS Gyroscope with Digital Force Feedback”, Proc. of Transducers '03, Jun. 2003, 1D4.1.

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