Fluid handling – Systems – With flow control means for branched passages
Patent
1995-03-17
1997-02-25
Fox, John C.
Fluid handling
Systems
With flow control means for branched passages
137240, F16K 1110
Patent
active
056051794
ABSTRACT:
A novel integrated gas panel is described. The integrated gas panel of the present invention, comprises a plurality of individual process gas modules or blocks coupled together with a plurality of gaskets located between them. Each process gas module comprises an upstream isolation valve coupled between a process gas inlet and an MFC inlet. An upstream purge valve is coupled between an upstream purge port and the MFC inlet. A mass flow controller is coupled between the MFC inlet and an MFC outlet. A mix isolation valve is coupled between the MFC outlet and a mix port. The modules are coupled together such that respective ports of each module are in fluid communication with one another to form a common tube or port. Gaskets placed between the various modules either allow or block the flow of gas between ports of adjacent modules. By arranging blocks and gaskets in different ways, gas panels with a wide variety of different functions and capabilities can be easily designed and fabricated.
REFERENCES:
patent: 3915194 (1975-10-01), Friedrich
patent: 4657047 (1987-04-01), Kolibas
patent: 5301717 (1994-04-01), Goedecke
patent: 5368062 (1994-11-01), Okumura et al.
patent: 5439026 (1995-08-01), Moriya et al.
Advertising material by Ultra Clean Technology, dated at least Jul., 1994.
Balma Frank R.
Elliot Brent D.
Strong, Jr. Benjamin R.
Fox John C.
Insync Systems, Inc.
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