Integrated galvanometer scanning device

Details Integrated galvanometer scanning device Integrated galvanometer scanning device

1992-08-03

1995-04-18

Fuller, Benjamin R.

Incremental printing of symbolic information

Light or beam marking apparatus or processes

Scan of light

359224, 359230, 359290, 359291, 324 97, 3461073, G10D 942

Patent

active

054082536

ABSTRACT:
An integrated galvanometer scanning device controllably deflects a beam of light. The device has a planar silicon wafer substrate with front and rear surfaces, first and second longitudinal slots extending from the front surface to the rear surface, and top and bottom grooves extending between the first and second longitudinal slots. The slots and grooves define a central portion of the wafer. A magnet is attached to the rear surface on the central portion of the wafer and a magnetic circuit is attached to the rear surface. A reflective surface is formed on the front surface on the central portion of the wafer. A strain gage on the wafer detects deflection of the reflective surface, and thus beam deflection. The components are integrated into the wafer or formed or mounted on the wafer forming an integrated unitary structure.

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patent: 5172262 (1992-12-01), Hornbeck
patent: 5268784 (1993-12-01), Chaya

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