Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1985-07-25
1987-07-14
Levy, Stewart J.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
73514, 73517R, 403291, G01P 1502
Patent
active
046794344
ABSTRACT:
An accelerometer fabricated from a semiconductor substrate sandwiched between two non-conductive plates is shown having an inertial mass formed by etching the substrate. The mass is joined to the substrate by hinges having crossed blades to provide flexure in one direction and rigidity in other directions. The fabrication technique permits the integration of accelerometer servo and signal processing circuitry upon the same substrate in which the accelerometer mass is formed.
REFERENCES:
patent: 2793028 (1957-05-01), Wheeler
patent: 2947067 (1960-08-01), Vice et al.
patent: 3226981 (1966-01-01), Mullins et al.
patent: 3713088 (1973-01-01), Lehner et al.
patent: 3897997 (1975-08-01), Kalt
patent: 3978715 (1976-09-01), Farstad
patent: 4009607 (1977-03-01), Ficken
patent: 4188829 (1980-02-01), Brown
patent: 4345474 (1982-08-01), Deval
patent: 4483194 (1984-11-01), Rudolf
patent: 4533100 (1985-08-01), Paseri
Petersen et al., "Micromechanical Accelerometer Integrated with MOS Detection Circuitry", in Proc. Int. Electron Devices Meeting (Dec. 1980), pp. 673-675.
Chapman, Jr. John E.
Levy Stewart J.
Litton Systems Inc.
LandOfFree
Integrated force balanced accelerometer does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Integrated force balanced accelerometer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Integrated force balanced accelerometer will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1421035