Integrated flow sensor for measuring a fluid flow

Details Integrated flow sensor for measuring a fluid flow Integrated flow sensor for measuring a fluid flow

2006-06-13

2006-06-13

Patel, Harshad (Department: 2855)

Measuring and testing

Volume or rate of flow

Thermal type

Reexamination Certificate

active

07059186

ABSTRACT:
An integrated flow sensor for determining a fluid flow is described. It has a first function layer and a second function layer which is applied to the first function layer and is electrically connected thereto, a fluid channel being situated in the function layers to conduct a fluid flow, at least one heating region and at least one measuring region being provided adjacent to the fluid channel, the first function layer being either not covered by the second function layer in the heating region and in the measuring region or being insulated from the above-situated second function layer, the first function layer or the second function layer having an increased resistance at least in the heating region, the flow sensor being connectable in such a way that it conducts a heating current through the first or second function region of the heating region, and/or measures a resistance value of the first or second function layer in the measuring region, and the fluid flow being determinable as a function of the measured resistance value at a constant heat output or as a function of the required heat output at a predefined resistance value.

REFERENCES:
patent: 5965813 (1999-10-01), Wan et al.
patent: 6032689 (2000-03-01), Tsai et al.
patent: 6655207 (2003-12-01), Speldrich et al.

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