Integrated flow controller module

Details Integrated flow controller module Integrated flow controller module

2000-01-11

2001-03-27

Michalsky, Gerald A. (Department: 3753)

Fluid handling

Processes

Cleaning, repairing, or assembling

C137S486000, C251S011000

Reexamination Certificate

active

06206022

ABSTRACT:

FIELD OF THE INVENTION
The present invention relates to an integrated flow controller module, especially to an integrated flow sensor module comprising a pressure sensitive flow sensor.
BACKGROUND OF THE INVENTION
Due to the developments in the micro machining technology, a micro flow controller module comprising a plurality of sensors, actuators and control circuits may be integrated in one single dice. An integrated micro flow controller prepared with the micro machining technology is capable of measuring and controlling flows within a microchannel. When the flow to be measured and controlled is a gaseous flow, the applicable velocity may be under 1/min. For a liquid flow, the applicable velocity may be at the scale of &mgr;l/min. The geometric scale of a flow controller is centimeter. The advantages of the integrated micro flow controller include energy saving, short response time and compactness. Micro flow controllers may further be associated in matrix to precisely control flows in a larger scale.
A micro flow controller module generally includes a flow sensor to measure the velocity of a flow, a microvalve to control the velocity and a system controller circuit to control the operation of the microvalve. In the conventional art, the microvalve may be an electromagnetic or a piezoelectric valve. The flow sensor may be a wicked thermal flow sensor. Due to the numbers and volumes of the components, volume of a micro flow controller is always bulky. In addition, these components must be prepared and assembled under superfine processes and packaged mechanically. As a result, manufacture costs of the micro flow controller may not be reduced.
It is thus a need in the industry to have an integrated flow controller where a flow sensor and a microvalve are integrated in one single dice. It is also a need to have a compact flow controller module that may be prepared under the semiconductor manufacture process.
OBJECTIVES OF THE INVENTION
The purpose of this invention is to provide an integrated flow controller module where a flow sensor and a microvalve are integrated in one single dice.
Another purpose of this invention is to provide an integrated flow controller module that may be prepared under the semiconductor manufacture process.
Another purpose of this invention is to provide a simplified, compact and reliable micro flow controller module.
Another purpose of this invention is to provide an integrated micro flow controller module comprising a pressure sensitive flow sensor.
Another purpose of this invention is to provide a micro flow sensor suited in the above integrated flow controller modules.
Another purpose of this invention is to provide methods for the preparation of the above integrated micro flow controller module and its micro flow sensors.
SUMMARY OF THE INVENTION
According to the present invention, an integrated flow controller module comprising at least one micro flow sensor and a microvalve is disclosed. The micro flow sensor and the microvalve are integrated in a micro flow channel. The micro flow sensor comprises a pressure sensitive flow sensor. The micro flow channel is provided with an orifice adjacent to the flow sensor to enlarge the pressure of a flow to be measured. The microvalve comprises a silicon microbridge with a mesa structure and is driven by a voltage. The microvalve may operate under a normally closed mode or a normally open mode.
These and other objectives and purposes may be clearly understood from the detailed description of the invention by referring to the following drawings.


REFERENCES:
patent: 4821997 (1989-04-01), Zdeblick
patent: 5029805 (1991-07-01), Albarda et al.
patent: 5529279 (1996-06-01), Beatty et al.
patent: 5785295 (1998-07-01), Tsai
patent: 5975485 (1999-11-01), Tsai et al.

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