Integrated flow controller module

Details Integrated flow controller module Integrated flow controller module

1998-10-30

2000-03-07

Michalsky, Gerald A.

Fluid handling

Line condition change responsive valves

Pilot or servo controlled

1374875, 251 11, G05D 706

Patent

active

060326891

ABSTRACT:
A flow controller module comprising at least one micro flow sensor and a microvalve, integrated in a micro flow channel, is disclosed. The micro flow sensor comprises a pressure sensitive flow sensor. At the position of the micro flow sensor, the micro flow channel is provided with an orifice so that pressure of a flow may be enlarged to facilitate measurement of the flow speed. The microvalve comprises a silicon microbridge with a mesa structure and is driven by a voltage. The microvalve may operate under a normally closed mode or a normally open mode. Disclosed in this invention is also a flow sensor suited in the integrated flow controller module. Methods for preparing the flow sensor and the flow controller module are also disclosed.

REFERENCES:
patent: 4821997 (1989-04-01), Zdeblick
patent: 5785295 (1998-07-01), Tsai

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